DC magneton sputtering


Specifications :
  • The Plassys MP 600S confocal sputtering system based on DC magnetron sputtering principle
  • 5 confocal magnetron sputtering sources, interchangeable
  • Chamber suitable for samples up to 100mm, substrate temperature up to 800°C
  • The main chamber is cryopumped and turbo pumped (10^-9 mbar), the machine is also equipped of a load lock with is turbo pumped (10^-6 mbar)
  • Ar, O2, N2 gas lines with mass flow controllers

  • Four tips probe station