DC magneton sputtering

   

Specifications :
  • The Plassys MP 600S confocal sputtering system based on DC magnetron sputtering principle
  • 6 confocal magnetron sputtering sources, interchangeable
  • Chamber suitable for samples up to 150mm, substrate temperature up to 800°C
  • The main chamber is cryopumped and turbo pumped (10^-9 mbar), the machine is also equipped of a load lock with is turbo pumped (10^-6 mbar)
  • Ar, O2, N2, CF4 gas lines with mass flow controllers



  • Four tips probe station

       


    Microbonding