Magnetic field resilient high kinetic inductance superconducting niobium nitride coplanar waveguide resonators

High quality superconducting microwave resonators are at the heart of circuit quantum electrodynamics experiments. Here, we report on simple to fabricate coplanar waveguide resonators fabricated from a thin film of NbN. Using the large kinetic inductance of NbN, we achieve characteristic impedances of up to 4 kOhm. These large impedances, paired with the excellent magnetic field resilience (see figure), makes these resonators perfectly suited for cQED experiments requiring magnetic fields such as spin qubits.

Read more in Yu et al. APL 118 054001 (2021)