FEDER and PEPR Quantique funding state of the art ALE/ALD nanofabrication equipment- Dec 2025
Quantum computing promises numerous computational breakthroughs, ranging from algorithmic optimization to the development of chemical catalysts.
Achieving this requires a large number of quantum bits—qubits—within a single processor.Our team studies elementary processors built on semiconductor materials,
which enables the use of microelectronics manufacturing capabilities for large-scale fabrication.
Quantum processors based on silicon–germanium alloys in particular have demonstrated their potential in recent years.These highly promising qubits require extremely fine and specialized nanofabrication.
The ALE–ALD equipment, the only one of its kind in France, is co-funded by the Auvergne–Rhône-Alpes region
and the European Union, as well as the PEPR Quantique program .
It is expected to revolutionize the quality of quantum processors produced by the CEA. It enables etching and material deposition with exceptionally precise and delicate control,
down to the atomic level. Installed in a dedicated cleanroom, this equipment supports substrates up to 200 mm, compatible with the region’s semi-industrial cleanroom facilities.
Because of its versatility, it will become central to the fabrication of many quantum devices for the surrounding community, and it will undoubtedly serve as a focal point for building an ecosystem and a community of experts around this innovative platform.
Because of its versatility, it will become central to the fabrication of many quantum devices for the surrounding community, and it will undoubtedly serve as a focal point for building an ecosystem and a community of experts around this innovative platform.
